8英寸芯片生产流水线配套设施 NO名称（中）名称（英）型号生产商/材数 7货柜cabinet ESTPVC2 9i线存储机i-LINESTOCKER SUNGJINPVC1 i线存储机i-LINESTOCKER SUNGJINPVC1 10晶片存储机waferSTOCKER ESTPVC1 18自动洗手烘干机 handwasher(1person) TNCPVC1 自动洗手烘干机 handwasher(1person) TNCPVC4 19货架（单层）1floorshelfW80*D60*H80KUAIJIE/NAPES/CASUS3041 20货架（单层）1floorshelfW90*D50*H80KUAIJIE/NAPES/CASUS3042 21货架（单层）1floorshelfW90*D60*H82KUAIJIE/NAPES/CASUS3049 22货架（单层）1floorshelfW120*D60*H81KUAIJIE/NAPES/CASUS3043 23 HOLETYPEWORK1FLOOR2*4CSTKUAIJIE/NAPES/CASUS30451 24货架（单层）1floorshelfW130*D50*H80KUAIJIE/NAPES/CASUS3041 25货架（单层）1floorshelfW130*D70*H90KUAIJIE/NAPES/CASUS30423 26货架（单层）1floorshelfW130*D80*H96KUAIJIE/NAPES/CASUS3045 27货架（单层）1floorshelfW150*D75*H90KUAIJIE/NAPES/CASUS30415 28货架（单层）1floorshelfW150*D25*H67KUAIJIE/NAPES/CASUS3046 29货架（单层）1floorshelfW180*D25*H73KUAIJIE/NAPES/CASUS3041 30货架（单层）1floorshelfW180*D70*H90KUAIJIE/NAPES/CASUS3041 31货架（双层）2floorshelfW56*D46*H108KUAIJIE/NAPES/CASUS30418 32货架（双层）2floorshelfW80*D45*H108KUAIJIE/NAPES/CASUS30450 33货架（双层）2floorshelfW110*D25*H62KUAIJIE/NAPES/CASUS3042 34货架（双层）2floorshelfW110*D25*H88KUAIJIE/NAPES/CASUS30414 35货架（双层）2floorshelfW110*D25*H90KUAIJIE/NAPES/CASUS30423 36货架（双层）2floorshelfW150*D25*H85KUAIJIE/NAPES/CASUS30440 37货架（双层）2floorshelfW180*D25*H87KUAIJIE/NAPES/CASUS30414 38货架（三层）3floorshelfW56*D45*H122KUAIJIE/NAPES/CASUS30413 39货架（三层）3floorshelfW60*D60*H80KUAIJIE/NAPES/CASUS3041 40货架（三层）3floorshelfW80*D46*H132KUAIJIE/NAPES/CASUS30420 41货架（三层）3floorshelfW106*D45*H122KUAIJIE/NAPES/CASUS3043 42货架（三层）3floorshelfW130*D45*H123KUAIJIE/NAPES/CASUS30422 43货架（三层）3floorshelfW130*D46*H135KUAIJIE/NAPES/CASUS30410 44货架（三层）3floorshelfW120*D40*H180KUAIJIE/NAPES/CASUS3041 45货架(STORE"M)shelf(storeR"M)W90*D40*H180KUAIJIE/NAPES/CASUS3042 46货架(STORE"M)shelf(storeR"M)W175*D66*H185KUAIJIE/NAPES/CASUS3043 47ASMLRTL-货架shelf(ASMLRTL)W1800*D350*H1500KUAIJIE/NAPES/CASUS3045 48货架（六层）6floorshelfW180*D32*H160KUAIJIE/NAPES/CASUS3041 49RFID-货架RFID-SHELF2floor,8CSTKUAIJIE/NAPES/CASUS30454 50RFID-货架RFID-SHELF2floor,10CSTKUAIJIE/NAPES/CASUS304100 51RFID-车RFID-CART6CSTSUNGJINSUS30461 52RFID-车RFID-CART4CSTSUNGJINSUS30469 55汽车光刻机货架AutoAlignershelfW25*D30*H66KUAIJIE/NAPES/CASUS30427 56晶片废料储柜Waferscrapstocker SUNGJINSUS3043 57W/F磁带清洁盒W/FCASSETTECLEANBOX KUAIJIE/NAPES/CASUS3044 73平区光刻机FlatZoneAligner H-SQUARE 21 74自动平区光刻机AutoZoneAligner 27 75平区光刻机FlatZoneAligner SEYANG 11 76气压起重机Vacuumpickupsystem SEYANG 23 77晶片传送机WAFERTRANERMACHINE SEYANG 8 78自动8英寸芯片传送机AUTO 8"WAFERESCALATOR H-SQUARE 1 79手动8英寸芯片传送机Manual8"WAFERESCALATOR H-SQUARE 1 80真空提示VACUUMTIP 50 81真空吸笔VACUUMWAND 50 82真空灯座VACUUMHOLDER 50 84晶片运输盒WAFERSHIPPINGBOX ESTC 1204 96氮气储存瓶N2StorageBOX(CST) 3 99门存储柜-1DOORSTORAGECABINETCABINET-1 PVC1 100门存储柜-2DOORSTORAGECABINETCABINET-2 PVC1 101门存储柜-3DOORSTORAGECABINETCABINET-3 PVC1 102门存储柜-4DOORSTORAGECABINETCABINET-4 PVC1 103门存储柜-5DOORSTORAGECABINETCABINET-5 PVC1 104门存储柜-6DOORSTORAGECABINETCABINET-6 PVC1 105门存储柜-7DOORSTORAGECABINETCABINET-7 PVC1 106门存储柜-8DOORSTORAGECABINETCABINET-8 PVC1 109门存储柜-11DOORSTORAGECABINETCABINET-11 PVC1 110门存储柜-12DOORSTORAGECABINETCABINET-12 1 111门存储柜-13DOORSTORAGECABINETCABINET-13 PVC1 113大储存盒-15LargePartStorageBox15 PVC1 114大储存盒-16LargePartStorageBox16 PVC1 119零件储存柜PARTSTORAGECABINET PVC3 120大储存盒-22LargePartStorageBox22 PVC3 121门存储柜-15DOORSTORAGECABINETCABINET-15 PVC1 122门存储柜-16DOORSTORAGECABINETCABINET-16 PVC1 123大储存盒-25LargePartStorageBox25 PVC1 126大储存盒-28LargePartStorageBox28 PVC1 127大储存盒-29LargePartStorageBox29 PVC1 128大储存盒-30LargePartStorageBox30 PVC1 129大储存盒-31LargePartStorageBox31 PVC1 130大储存盒-32LargePartStorageBox32 PVC1 131大储存盒-33LargePartStorageBox33 PVC1 132大储存盒-34LargePartStorageBox34 PVC1 133大储存盒-35LargePartStorageBox35 PVC1 134大储存盒-36LargePartStorageBox36 PVC1 136大储存盒-38LargePartStorageBox38 PVC4 141柜子cabinet PVC1 144小储存盒-07SmallPartStorageBox07 PVC4 145小储存盒-08SmallPartStorageBox08 PVC1 146储存盒-08StorageBox PVC1 149清洁用桌CleaningRoomParttable Steel1 150零件搬运车PARTTRANERCART PVC2 151车Cart(sus) PVC1 152货柜Cabinet PVC12 156工具车ToolCart Steel3 157模型装载车DummyLoadCart Steel2 158冷水机线和排气线桶ChillerLine＆ExhaustLineBucket Steel13 159个人工具柜PersonalToolCabinet PVC2 160氮气储存瓶N2BOX SUS1 161 SUS17 162蚀刻车ETCHCart SUS1 169零件储存柜PARTSTORAGECABINET(BOX) PVC1 171物理气相沉积大型存储＃9PVDLARGESTORAGE#9 PVC1 176零件储存PARTSTORAGE PVC1 180化学气相沉积大型存储＃9CVDLARGESTORAGE#9 PVC1 181化学气相沉积大型存储＃10CVDLARGESTORAGE#10 PVC1 182化学气相沉积大型存储＃11CVDLARGESTORAGE#11 PVC1 183化学气相沉积大型存储＃12CVDLARGESTORAGE#12 PVC1 186化学气相沉积大型存储＃1CVDLARGESTORAGE#1 PVC1 187化学气相沉积大型存储＃2CVDLARGESTORAGE#2 PVC1 188化学气相沉积大型存储＃3CVDLARGESTORAGE#3 PVC1 189化学气相沉积小型存储＃13CVDSMALLSTORAGE#13 PVC1 190化学气相沉积小型存储＃14CVDSMALLSTORAGE#14 PVC1 191物理气相沉积小型存储＃1PVDSMALLSTORAGE#1 PVC1 192物理气相沉积小型存储＃2PVDSMALLSTORAGE#2 PVC1 193工艺模组存储盒＃1PROCESSKITSSTOCKER#1 PVC1 194工艺模组存储盒＃2PROCESSKITSSTOCKER#2 PVC1 195工艺模组存储盒＃3PROCESSKITSSTOCKER#3 PVC1 196工艺模组存储盒＃4PROCESSKITSSTOCKER#4 PVC1 197工艺模组存储盒＃5PROCESSKITSSTOCKER#5 PVC1 198工艺模组存储盒＃6PROCESSKITSSTOCKER#6 PVC1 199工艺模组存储盒＃7PROCESSKITSSTOCKER#7 PVC1 200工艺模组存储盒＃8PROCESSKITSSTOCKER#8 PVC1 201工艺模组存储盒＃9PROCESSKITSSTOCKER#9 PVC1 202工艺模组存储盒＃10PROCESSKITSSTOCKER#10 PVC1 203工艺模组存储盒＃11PROCESSKITSSTOCKER#11 PVC1 204工艺模组存储盒＃12PROCESSKITSSTOCKER#12 PVC1 208手动/音标STAOCKERMANUAL/IPASTAOCKER PVC1 215 PVC1 216化学气相沉积储气库CVDGASSTORAGE SUS1 217TDMAT储气库TDMATGASSTORAGE SUS1 218 SUS27 222零件储存PARTSTORAGE PVC1 223零件储存PARTSTORAGE PVC2 228小零件储存柜SmallPart StorageCabinet PVC3 232董事会储物柜Board StorageCabinet PVC1 233气瓶储存柜GasBottleStorageCabinet PVC1 238门存储柜DOORSTORAGECABINET PVC2 242追踪零件柜Track PartsCabinet PVC1 244追踪工具柜TrackToolBOXCabinet PVC1 2452Plonum柜2PlonumCabinet PVC1 246检验柜Bepair＆ModifyCabinet PVC1 247管和电缆柜Tube＆CableCabinet PVC1 248氨过滤柜NH3FilterCabinet SUS1 256步进光罩StepperReticle PVC2 262跟踪捕捉圆锥外圈TrackCatchcup PVC1 263跟踪捕捉圆锥外圈TrackCatchcup PVC1 264跟踪捕捉圆锥外圈TrackCatchcup PVC1 268零件储存柜PartStorageCABINET PVC1 270工艺包储存盒Processkitsstocker PVC1 271功率放大器储存盒Ipastocker PVC1 272管储存盒Tubestocker PVC1 273零件存储柜（五） PartStorageCABINET(V) PVC1 274货柜CABINET PVC1 275零件储存柜PARTSTORAGECABINET PVC1 276配件储存盒repairpartsstocker PVC1 278铁框ARBox PVC8 281零件搬运车PARTTRANERCART PVC1 283加热器储存盒车Heaterstockercart SUS1 284丁香储存盒CLOVEstocker PVC1 285配件储存盒Partsstocker PVC4 286管储存盒Tube stocker PVC6 287配件储存盒Partsstocker PVC1 288配件储存盒Partsstocker PVC1 289配件储存盒Partsstocker PVC1 290配件储存盒Partsstocker PVC1 291训练班储存盒TCstocker PVC1 292配件储存盒Partsstocker PVC3 293配件储存盒Partsstocker PVC1 294配件储存盒Partsstocker PVC1 296配件储存盒Partsstocker PVC1 297配件储存盒Partsstocker PVC1 299配件储存盒Partsstocker PVC1 300配件储存盒Partsstocker PVC1 323零件储存柜（高）PARTStorageCABINET(H) PVC1 325零件储存柜PARTStorageCABINET PVC8 326零件柜PART CABINET PVC1 328配件储存盒Partsstocker SUS6 330零件柜PART CABINET PVC1 331零件储存柜PARTStorageCABINET PVC1 332零件储存柜（高）PARTStorageCABINET(H) PVC1 333工具柜TOOLCABINET PVC1 334零件储存柜PARTStorageCABINET PVC1 335工具柜TOOLCABINET PVC5 337工具柜TOOLCABINET SUS1 338门存储柜DOORSTORAGECABINET PVC2 339零件储存柜PARTStorageCABINET PVC7 342门存储柜DOORSTORAGECABINET PVC1 343门存储柜DOORSTORAGECABINET PVC4 344柜-1CABINET-1 PVC7 345柜-2CABINET-2 PVC2 346柜-3CABINET-3 PVC2 347柜-4CABINET-4 PVC3 348柜-5CABINET-5 SUS1 349柜-6CABINET-6 PVC1 350柜-7CABINET-7 PVC3 351柜-8CABINET-8 SUS1
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